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Application:
Step Height Calibration
Equipment:
Profilers and Atomic Force Microscope (AFM)
Features:
"Thin" Step Height < 1µm: Silicon Dioxide (not compatible with optical profiler)
"Thick" Step Height > 1 µm: Silicon (compatible with optical and mechanical profiler)
Traceability:
SI units through NIST
Product Range:
80 Å to 100 µm
Wafer Diameter
Step Height (Å)
200 mm
300 mm
80
SHS8-80
SHS12-80
180
SHS8-180
SHS12-180
440
SHS8-440
SHS12-440
880
SHS8-880
SHS12-880
1,800
SHS8-1800
SHS12-1800
4,500
SHS8-4500
SHS12-4500
9,400
SHS8-9400
SHS12-9400
Step Height (µm)
200 mm
300 mm
1.8
SHS8-1.8
SHS12-1.8
8.0
SHS8-8
SHS12-8
24.0
SHS8-24
SHS12-24
50.0
SHS8-50
SHS12-50
100.0
SHS8-100
SHS12-100
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VLSI Standards
REGISTERED TO ISO 9001: 2015
CERTIFICATE NO. 10000561 QM15