Available Models

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Model No. Wafer Diameter Nominal Pitch Values Nominal Step Height Value Part Numbers Quantity
ALSTS8-180 200 mm 3 / 10 / 20 m 18 nm 0347028-000
ALSTS8-440 200 mm 3 / 10 / 20 m 44 nm 0347030-000
ALSTS8-1000 200 mm 3 / 10 / 20 m 100 nm 0347032-000
ALSTS8-1800 200 mm 3 / 10 / 20 m 180 nm 0347034-000
ALSTS12-180 300 mm 3 / 10 / 20 m 18 nm 0347019-000
ALSTS12-440 300 mm 3 / 10 / 20 m 44 nm 0347021-000
ALSTS12-1000 300 mm 3 / 10 / 20 m 100 nm 0347023-000
ALSTS12-1800 300 mm 3 / 10 / 20 m 180 nm 0347025-000

Model Number Information for Autoload Surface Topography Standards

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