Available Models

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Model No. Wafer Size (mm) Resistivity (ohm.cm) Sheet Resistance (ohm/Square) Nominal Thickness Part Number Quantity
Resistivity Standard Recalibration -- -- -- -- N/A
RS3-0.002 76.2 0.002 0.04 508 Ám 354_VLSI
RS3-0.01 76.2 0.01 0.2 508 Ám 355_VLSI
RS3-0.03 76.2 0.03 0.6 508 Ám 356_VLSI
RS3-0.1 76.2 0.1 2.0 508 Ám 357_VLSI
RS3-0.3 76.2 0.3 6.0 508 Ám 358_VLSI
RS3-0.9 76.2 0.9 18 508 Ám 359_VLSI
RS3-3.0 76.2 3.0 60 508 Ám 363_VLSI
RS8-0.01 200 0.01 0.14 710 Ám 999_VLSI
RS8-0.03 200 0.03 0.42 710 Ám 1000_VLSI
RS8-0.1 200 0.1 1.4 710 Ám 1001_VLSI
RS8-1 200 1.0 14 710 Ám 1003_VLSI
RS8-3 200 3.0 42 710 Ám 1004_VLSI
RS12-0.02 300 0.02 0.26 760 Ám 1329_VLSI
RS12-1 300 1.0 13 760 Ám 1330_VLSI
RS12-10 300 10 132 760 Ám 1331_VLSI

Model Number Information for Resistivity / Sheet Resistance Standards

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