Available Models

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Model No. Wafer Diameter Particle Sizes Spot Populations Defect Locations Part Number Quantity
ECS8-0.5-5.0-2K 200 mm 0.5 Ám, 1.0 Ám, 2.0 Ám, and 5.0 Ám 2000 counts per size From notch (0║): 35║, 145║, 205║ and 325║ 1439_VLSI
ECS12-0.5-5.0-2K 300 mm 0.5 Ám, 1.0 Ám, 2.0 Ám, and 5.0 Ám 2000 counts per size From notch (0║): 35║, 145║, 205║ and 325║ 1348_VLSI

Model Number Information for Edge Contamination Standards

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