Available Models

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Model No. Design Description Featured Material Pitch Nominal Height Part Number Quantity
STS-Recal Any Any Any Any N/A
Note: Recertification of any STS model.
STS3-180P 12 mm x 8 mm silicon die with 3 etched pitch clusters Silicon dioxide coated with a uniform layer of platinum 3 Ám/10 Ám/20 Ám 18 nm 412_VLSI
STS3-440P 12 mm x 8 mm silicon die with 3 etched pitch clusters Silicon dioxide coated with a uniform layer of platinum 3 Ám/10 Ám/20 Ám 44 nm 414_VLSI
STS3-1000P 12 mm x 8 mm silicon die with 3 etched pitch clusters Silicon dioxide coated with a uniform layer of platinum 3 Ám/10 Ám/20 Ám 100 nm 411_VLSI
STS3-1800P 12 mm x 8 mm silicon die with 3 etched pitch clusters Silicon dioxide coated with a uniform layer of platinum 3 Ám/10 Ám/20 Ám 180 nm 413_VLSI
STS2-180P 12 mm x 8 mm silicon die with 3 etched pitch clusters Silicon dioxide coated with a uniform layer of platinum 1.8 Ám/3 Ám/5 Ám 18 nm 745_VLSI
STS2-440P 12 mm x 8 mm silicon die with 3 etched pitch clusters Silicon dioxide coated with a uniform layer of platinum 1.8 Ám/3 Ám/5 Ám 44 nm 418_VLSI
STS2-1000S 12 mm x 8 mm silicon die with 3 etched pitch clusters Uncoated silicon dioxide 1.8 Ám/3 Ám/5 Ám 100 nm 749_VLSI
STS2-1800S 12 mm x 8 mm silicon die with 3 etched pitch clusters Uncoated silicon dioxide 1.8 Ám/3 Ám/5 Ám 180 nm 751_VLSI

Model Number Information for Surface Topography Standards
STS is an acronym for Surface Topography Standard. Each standard contains 3 pitch grids patterned into a single film thickness. The model number identifies the nominal film thickness. Surface Topography Standards are traceable to SI units through NIST.

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