Application: Defect Size Calibration on Wafer Edge and Bevel
Equipment: Edge Defect Inspection
Material: Polystyrene Latex Sphere (PSL) on Silicon
Traceability: SI units through NIST
Product Range: 0.5 Ám to 5 Ám

Full Wafer Depositions

Wafer Diameter 200 mm 300 mm
Number of Spheres 2,000 2,000
Particle Diameter (nm)
0.5, 1.0, 2.0, and 5.0 ECS8-0.5-5.0-2K ECS12-0.5-5.0-2K

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