Application: Range Defect Size Calibration Equipment: Defect Inspection Material: Polystyrene Latex Sphere (PSL) on Silicon Traceability: SI units through NIST Product Range: 50 nm to 3 µm* *Other sizes and sphere counts available upon request Wafer Diameter 200 mm 300 mm Number of Spheres per Spot 5,000 5,000 Particle Diameters (nm) Spots Small 50, 60, 72, 83 4 LCS8-4S-50-83 LCS12-4S-50-83 60, 83, 102, 126, 155 5 LCS8-5S-60-155 LCS12-5S-60-155 50, 55, 60, 64, 72, 81 6 LCS8-6S-50-81 LCS12-6S-50-81 Large 204, 304, 494, 1112 4 LCS8-4S-204-1112   204, 304, 494, 1112, 3040 5 LCS8-5S-204-3040 LCS12-5S-204-3040 155, 204, 304, 494, 1112, 3040 6 LCS8-6S-155-3040 LCS12-6S-155-3040