|Pictured is a Thick Step Height Standard with chrome coating and showing the step height bar in the center. There are also V-Track and Pitch Array diagnostic tools featured.|
TAKING CALIBRATION A STEP FORWARD. Step Height Standards (SHS) are designed for the calibration of mechanical or optical surface profilers. These optical or mechanical profiler standards consist of a 25 mm x 25 mm x 3 mm quartz block with a precisely etched uniform bar along with various test and diagnostic features. The choice of the material for manufacturing the optical or mechanical profiler standard-an ultra smooth quartz photomask blank-assures a very flat and smooth working surface as well as parallelism of the top and bottom surface within a few seconds of arc.
Step Height Standards (Quartz) Product Description
Specifications for Step Height Standards with Steps Smaller than 1 µm:
The calibration area of the Step Height Standards consists of a positive step 100 Ám wide and 750 Ám in length and is clearly marked with pointers. The design of this optical or mechanical profiler standard incorporates diagnostic features such as incremental pitch for stylus dynamics, size and resolution, a "V" shaped feature for checking stylus integrity, alignment marks, a ruler to facilitate scan length set-up, as well as cross-hair overlay and stylus alignment features. The zoom box and the incremental x, y grid permit determination of the magnification linearity of both optical and mechanical profiler standards. The profiler calibration standard is coated with a conformal layer of Chromium 90 nm thick to ensure high reflectivity.
Product Description for Step Height Standards larger than 1 µm
The actual profiler calibration area consists of a negative feature (trench) 1 mm wide and 2.5 mm in length and is clearly marked with pointers. Two additional pitch structures form a test track for stylus dynamics and scan speed set-up, while two "V" shaped features can be used to determine the integrity and cleanliness of the stylus. The profiler calibration standard is coated with a conformal layer of Chromium 90 nm thick to ensure high reflectivity.
Step Height Standards (Quartz) Product Specifications
- Nominal Step Heights:
8 nm, 18 nm, 44 nm, 88 nm, 180 nm, 450 nm, 940 nm, 1.8 µm, 4.5 µm, 8.0 µm, 14.5 µm, 19.5 µm, 24 µm, 50 µm
- Substrate Size
25 mm x 25 mm x 3.0 mm
Traceable to SI Units through NIST Calibrated Specimens