Application: Step Height Calibration
Equipment: Optical and Mechanical Profiler and Atomic Force Microscope (AFM)
Features: "Thin" Step Height < 1µm: Silicion Dioxide
"Thick" Step Height > 1 µm: Silicion Dioxide
Traceability: SI units through NIST
Product Range: 80 Å to 100 µm

Wafer Diameter
Step Height (Å) 200 mm 300 mm
80 SHS8-80 SHS12-80
180 SHS8-180 SHS12-180
440 SHS8-440 SHS12-440
880 SHS8-880 SHS12-880
1,800 SHS8-1800 SHS12-1800
4,500 SHS8-4500 SHS12-4500
9,400 SHS8-9400 SHS12-9400
Step Height (µm) 200 mm 300 mm
1.8 SHS8-1.8 SHS12-1.8
8.0 SHS8-8 SHS12-8
24.0 SHS8-24 SHS12-24
50.0 SHS8-50 SHS12-50
100.0 SHS8-100 SHS12-100

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