Approved Single-Wafer Carriers

Wafer Size Vendor Part Number Description Website
Chips < 2in. Gel-Pak VB-22/16C-00-x4 Vacuum Release Box www.gelpak.com
2in.
2in.
2in.
Entegris
Entegris
Entegris
H22-20-0615
H22-201-0615
H22-202-0615
Tray
Cover
Spring
www.wafercare.com
 
 
3in.
3in.
3in.
Entegris
Entegris
Entegris
H22-30-0615
H22-301-0615
H22-302-0615
Tray
Cover
Spring
 
 
 
4in.
4in.
4in.
Entegris
Entegris
Entegris
H22-40-0615
H22-401-0615
H22-402-0615
Tray
Cover
Spring>
 
 
 
5in.
5in.
5in.
Entegris
Entegris
Entegris
H22-50-0615
H22-501-0615
H22-502-0615
Tray
Cover
Spring
 
 
 
6in.
6in.
6in.
Entegris
Entegris
Entegris
H22-60-0615
H22-601-0615
H22-602-0615
Tray
Cover
Spring
 
 
 
150mm
200mm
300mm
Entegris
Entegris
Entegris
H93-60-101-1116
H93-80-101-1116
H93-120-101-116
Clamshell
Clamshell
Clamshell
 
 
 

150 and 200mm Clamshell
300mm Clamshell
2-6in Carrier
Front Opening Unified Pod

Approved Single-Wafer Carriers

Wafer Size Vendor Part Number Description Website
150mm
200mm
300mm
300mm
Shin-Etsu
Shin-Etsu
Shin-Etsu
Entegris
NW150M
MW200N
MW300G
A300 G3
Cassete shipper
Cassete shipper
Front Opening Shipping Box
Front Opening Unified Pod
www.shinpoly.co.jp/english
 
 
www.wafercare.com

150 and 200mm Clamshell
300mm Clamshell
2-6in Carrier
Front Opening Unified Pod