20 Years of Product Introductions at VLSI Standards |
1984 - |
VLSI Standards, Inc. founded by Rury Ervin, Josef Berger and Bob Monteverde |
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1985 - |
Surface Contamination Standards, Absolute Contamination Standards |
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1986 - |
Step Height Standards, Sheet Resistance Standards, Equipment Qualification Service, Clean Room Sentry |
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1987 - |
Film Thickness Standards, Resistivity Standards, Surface Roughness Standards |
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1988 - |
Line Width Standards |
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1989 - |
Custom Deposition Service, Overlay Standards |
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1990 - |
Custom Film Thickness Measurement Service, Monodisperse Contamination Standards |
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1991 - |
250 Angstrom Film Thickness Standards, Thin Film References and Sets, Surface Topography Standards |
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1992 - |
75 Angstrom Thin Film Reference, Below 0.2 micron Absolute Contamination Standards, Particle Deposition Systems, Profiling Standards Sets, 80 Angstrom Step Height Standard |
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1993 - |
Film Thickness Measurement Service by Spectroscopic Ellipsometry |
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1994 - |
200 mm Film Thickness Standards, Particle Deposition System Support Kits |
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1995 - |
Reticle Contamination Standards, Silicon Sheet Resistance Standards, STS2, a Surface Topography Standards with a minimum lateral pitch of 1.8 µm |
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1996 - |
ISO 9001-1994 Certified |
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1997 - |
Nitride Film Thickness Standards, 4.5 nm and 7.5 nm Thin Film Thickness Standards |
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1998 - |
200 mm Resistivity Standards, PDS-80 |
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1999 - |
15 Years of Excellence |
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2000 - |
Calibration Curves, 300 mm Absolute Contamination Standards |
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2001 - |
ISO 9001-2000 Certified, Aluminum Resistivity Standards, AutoLoad Step Height Standards |
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2002 - |
200 mm NanoLattice Standards |
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2003 - |
300 mm X,Y NanoLattice Standards |
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2004 - |
20 Years of Excellence, 20 nm Film Thickness Standards |
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2005 - |
NanoCD standards |
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2006 - |
ITO sheet resistance standards for the flat panel display industry, NanoLattice and NanoCD for the mask industry. |
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2007 - |
300 mm Resistivity Standards |
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2008 - |
Solar Reference Cells, Silica Contamination Standards, Edge Contamination Standards |