Contamination Products

Edge Contamination Standards (ECS)

Application: Defect Size Calibration on Wafer Edge and Bevel Equipment: Edge Defect Inspection Material: Polystyrene Latex Sphere (PSL) on Silicon Traceability: SI units through NIST Product Range: 0.5 µm to 5 µm Full Wafer Depositions Wafer Diameter 200 mm 300 mm Number of Spheres 2,000 2,000 Particle Diameter (nm) 0.5, 1.0, 2.0, and 5.0 ECS8-0.5-5.0-2K ECS12-0.5-5.0-2K