 |
|
|
 |
| Application: |
3-Dimensional Calibration
|
| Equipment: |
Optical inteferometric microscope and Atomic
Force Microscope (AFM)
|
| Features: |
Silicon Dioxide Coated with Chromium
|
| Traceability: |
SI units through NIST |
| Product Range: |
Pitch (X and Y): 3, 10 and 20 µm
Height (Z): 180 Å - 1,800 Å
|
|
| Feature Dimension
|
Wafer Diameter
|
| Z (Å)
|
X (µm)
|
Y (µm)
|
200 mm
|
300 mm
|
| 180
|
3, 10 and 20
|
3, 10 and 20
|
ALSTS8-180
|
ALSTS12-180
|
| 440
|
3, 10 and 20
|
3, 10 and 20
|
ALSTS8-440
|
ALSTS12-440
|
| 1,000
|
3, 10 and 20
|
3, 10 and 20
|
ALSTS8-1000
|
ALSTS12-1000
|
| 1,800
|
3, 10 and 20
|
3, 10 and 20
|
ALSTS8-1800
|
ALSTS12-1800 |
|
|
|
|
|
|
