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Application:
Line Width Calibration
Equipment:
CD-AFM and CD-SEM
Features:
Amorphous Silicon Isolated Line
Traceability:
SI units through NIST
Product Range:
70 nm to 110 nm
Wafer Diameter
200 mm
300 mm
Layout
X
XY
X
XY
Line Width (nm)
70
NCD8-70X
NCD8-70XY
NCD12-70X
NCD12-70XY
110
NCD8-110X
NCD8-110XY
NCD12-110X
NCD12-110XY
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