Product Overview
Contamination Products
Film Thickness Products
Dimensional Products
NanoCD Standards
NanoCD Standards for Mask Handling Tools
NanoLattice Pitch Standard
Nanolattice Standards for Analytical Instruments
NanoLattice Pitch Standard for Mask Handling Tools
Surface Topography Standards
Surface Topography References
AutoLoad Surface Topography Standards
Step Height Standards (Quartz)
Ultra Thick Step Height Standards
AutoLoad Step Height Standards
Electrical Products
Solar Products
Dimensional Products
NanoCD Standards (NCD)

Application: Line Width Calibration
Equipment: CD-AFM and CD-SEM
Features: Amorphous Silicon Isolated Line
Traceability: SI units through NIST
Product Range: 70 nm to 110 nm

Wafer Diameter 200 mm 300 mm
Layout X XY X XY
Line Width (nm)
70 NCD8-70X NCD8-70XY NCD12-70X NCD12-70XY
110 NCD8-110X NCD8-110XY NCD12-110X NCD12-110XY

Products  |  Recertification  |  ISO & QS Support  |  Company  |  Contact  |  Home
© 2025 VLSI Standards, Inc. Terms of Use   
VLSI Standards
REGISTERED TO ISO 9001: 2015
CERTIFICATE NO. 10000561 QM15