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|
 |
| Application: |
Pitch and Magnification Calibration |
| Equipment: |
Analytical CD-SEM, AFM |
| Features: |
100 nm pitch etched into silicon |
| Traceability: |
NIST |
|
THIN
| Single die |
Thin Mount Adaptor
(Thickness) |
Model Number |
Pitch (nm)
100 |
|
| 0.8 mm |
NLSM-0.1-Thin-X |
| |
| Dual die |
Thin Mount Adaptor
(Thickness) |
Model Number |
Pitch (nm)
100 |
|
| 0.8 mm |
NLSM-0.1-Thin-XY |
|
THICK
| Single die |
Thick Mount Adaptor
(Thickness) |
Model Number |
Pitch (nm)
100 |
|
| 4.2 mm |
NLSM-0.1-Thick-X |
| |
| Dual die |
Thick Mount Adaptor
(Thickness) |
Model Number |
Pitch (nm)
100 |
|
| 4.2 mm |
NLSM-0.1-Thick-XY |
|
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|
|
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