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Application:
Film Thickness Calibration
Equipment:
Single Wavelength Ellipsometer (SWE), Spectroscopic Ellipsometer (SE), Reflectometer
Film:
Silicon Nitride
Traceability:
NIST
Product Range:
200 Å to 2,000 Å
Wafer Diameter
Film Thickness (Å)
100 mm
125 mm
150 mm
200 mm
200
NFTS4-200
NFTS5-200
NFTS6-200
NFTS8-200
900
NFTS4-900
NFTS5-900
NFTS6-900
NFTS8-900
1,200
NFTS4-1200
NFTS5-1200
NFTS6-1200
NFTS8-1200
2,000
NFTS4-2000
NFTS5-2000
NFTS6-2000
NFTS8-2000
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CERTIFICATE NO. 10000561 QM15