Approved Single-Wafer Carriers

Wafer Size	Vendor	Part Number	Description	Website
Chips < 2in.	Gel-Pak	VB-22/16C-00-x4	Vacuum Release Box	www.gelpak.com
2in. 2in. 2in.	Entegris Entegris Entegris	H22-20-0615 H22-201-0615 H22-202-0615	Tray Cover Spring	www.wafercare.com
3in. 3in. 3in.	Entegris Entegris Entegris	H22-30-0615 H22-301-0615 H22-302-0615	Tray Cover Spring
4in. 4in. 4in.	Entegris Entegris Entegris	H22-40-0615 H22-401-0615 H22-402-0615	Tray Cover Spring>
5in. 5in. 5in.	Entegris Entegris Entegris	H22-50-0615 H22-501-0615 H22-502-0615	Tray Cover Spring
6in. 6in. 6in.	Entegris Entegris Entegris	H22-60-0615 H22-601-0615 H22-602-0615	Tray Cover Spring
150mm 200mm 300mm	Entegris Entegris Entegris	H93-60-101-1116 H93-80-101-1116 H93-120-101-116	Clamshell Clamshell Clamshell

150 and 200mm Clamshell 300mm Clamshell 2-6in Carrier Front Opening Unified Pod Approved Single-Wafer Carriers

Wafer Size	Vendor	Part Number	Description	Website
150mm 200mm 300mm 300mm	Shin-Etsu Shin-Etsu Shin-Etsu Entegris	NW150M MW200N MW300G A300 G3	Cassete shipper Cassete shipper Front Opening Shipping Box Front Opening Unified Pod	www.shinpoly.co.jp/english     www.wafercare.com

150 and 200mm Clamshell 300mm Clamshell 2-6in Carrier Front Opening Unified Pod