Application: Pitch and Magnification Calibration Equipment: CD-SEM Features: 100 nm pitch etched into silicon Traceability: SI units through NIST Wafer Diameter 200 mm 300 mm Layout X XY X XY Pitch (nm) 100 NLSM8-0.1X NLSM8-0.1XY NLSM12-0.1X NLSM12-0.1XY